Cleaning results (ultra-pure water vs. ultra-fine bubbles)
After ultra-pure water jet cleaning
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1000 × magnification |
3000 × magnification |
After ultra-pure water ＋ ultrafine bubble jet cleaning
|
1000 × magnification |
3000 × magnification |
Quantitive comparison of cleaning results
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Condition |
Residual particle area (μ㎡) |
| Before cleaning | 359–472 μ㎡ |
| After ultra-pure water cleaning | 320–482 μ㎡ |
| After ultra-pure water ＋ UFB jet cleaning | 28.65 μ㎡ / 37.33 μ㎡ |
Verified cleaning principle
We experimentally verified the cleaning effect by utilizing the high internal pressure of ultrafine bubbles. When the bubbles collapse, the resulting pressure waves removed fine particles from the solid surface. Particles larger than 1 μm were no longer observed after cleaning. As a result, the washable surface area increased, reaching 92%.