The result of cleaning with ultra fine bubbles
After ultra pure water cleaning
 1000 magnification |
 3000 magnification |
After ultra pure water ＋ ultra fine bubble cleaning
 1000 magnification |
 3000 magnification |
Results of cleaning
| After cleaning | After ultra pure water cleaning | After ultra pure water jet ＋ ultra fine bubble cleaning | ||
| picture of 1000 magnification | picture of 3000 magnification | |||
| Square measure | 359～472um2 | 320～482um2 | 28.65um2 | 37.33um2 |
| Cleaning rate due to ultra fine bubbles ： 92.13％ as area ratio | ||||
Experimentally validated the effect of removing particles on the solid surface by pressure waves, utilizing the characteristics of high pressure inside the ultra-fine-bubbles.
It became clear that particles above 1 micron were removed and no longer observed, and that the area percentage that could be washed reaches 92%.