Outline of experimental apparatus
Calculation method of the number of fine particles and the number of bubbles increased
Outline of cleaning experiment
Cleaning result using ultra-fine-bubble
Effect of cleaning
|Before cleaning||After ultra-pure water cleaning||After ultra-pure water + ultra-fine-bubble jet cleaning|
|picture of 1000 magnification||picture of 3000 magnification|
|Cleaning rate due to UFB : 92. 13% as area ratio|
Experimentally verified the effect of removing fine particles on the solid surface by pressure waves, utilizing the characteristic that the inside of ultra-fine-bubbles become high pressure.
It became clear that the fine particles over 1 micron were removed and no longer observed, and that the ratio of the area that could be washed reached 92%.