Outline of experimental apparatus
Calculation method of the number of fine particles and the number of bubbles increased
Outline of cleaning experiment
Cleaning result using ultra-fine-bubble
Effect of cleaning
| Before cleaning | After ultra-pure water cleaning | After ultra-pure water + ultra-fine-bubble jet cleaning | ||
| picture of 1000 magnification | picture of 3000 magnification | |||
| Square measure | 359～472um2 | 320～482um2 | 28.65um2 | 37.33um2 |
| Cleaning rate due to UFB : 92. 13% as area ratio | ||||
Experimentally verified the effect of removing fine particles on the solid surface by pressure waves, utilizing the characteristic that the inside of ultra-fine-bubbles become high pressure.
It became clear that the fine particles over 1 micron were removed and no longer observed, and that the ratio of the area that could be washed reached 92%.